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Thermo Scientific Phenom ProX G6 is a desktop SEM with a CeB6 source and integrated EDS detector for elemental analysis. An optical camera supports navigation, and a motorized stage positions specimens. This listing describes the G6 generation according to its datasheet.
SOURCECeB6thermionic
SEM MAGNIFICATION160–350,000×G6 datasheet
EDS25 mm²SDD active area
Key benefits
- Integrated EDS for elemental analysis.
- Thermionic CeB6 source.
- Color optical navigation camera.
- Motorized XY stage.
- Standard BSE with optional SED.
- EDS mapping and line scans with optional licences.
Technical specifications
| Model | Phenom ProX G6 |
|---|---|
| Source | CeB6 |
| Optical magnification | 27–160× |
| Electron magnification | 160–350,000× |
| Standard voltage settings | 5 / 10 / 15 kV |
| Advanced voltage range | 4.8–20.5 kV |
| Datasheet BSE resolution | ≤8 nm |
| Resolution with optional SED | ≤6 nm |
| Standard specimen | Ø25×35 mm |
| EDS detector | SDD, 25 mm² |
| Mn Kα energy resolution | ≤132 eV |
| EDS element range | B (5)–Cf (98) |
| Maximum image size | 7680×4800 px |
| Main unit W×D×H | 286×566×495 mm |
| Main unit weight | 50 kg |
Applications and configuration
For materials research and quality control; not for diagnostic procedures. Confirm the G6 generation, holders, computer and monitor, vacuum equipment, SED and EDS mapping licences. ProX has integrated EDS, while mapping and line scans are optional. The Ø25×35 mm limit applies to the standard holder; larger holders are agreed separately. Resolution depends on the detector and conditions. The manufacturer image illustrates a ProX-series workstation. Request a quote.
Compare with: JEOL JCM-7000Plus.