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Park NX20 atomic force microscope

In stock
SKU: Park NX20
  • Park NX20 atomic force microscope
Description

Park NX20 is an atomic force microscope for large samples and wafers up to 200 mm in diameter. It combines a separate Z scanner, a dual-servo XY scanner and a motorized stage. This listing describes the 100 × 100 µm XY and 15 µm Z configuration. The photograph shows an acoustic enclosure and workstation; the quotation defines the supply package.

XY SCAN RANGE100 × 100 µmselected configuration
Z SCAN RANGE15 µmselected configuration
WAFERS≤200 mmsample diameter

Key advantages

  • A vacuum-groove sample mount accommodates wafers up to 200 mm.
  • A motorized XY stage with 200 × 200 mm travel simplifies positioning across the sample.
  • Separate XY and Z scanners limit coupling between scan directions.
  • True Non-Contact measures topography without intentional tip contact with the surface.
  • A 5 MP on-axis camera supports observation of the cantilever and sample.
  • Optional modules extend measurements to electrical and mechanical properties.

Technical specifications

ModelPark NX20
XY scannerDual-servo, 100 × 100 µm; alternative 50 × 50 µm
Z scanner15 µm; alternative 30 µm configuration
Sample mountVacuum grooves for wafers up to 200 mm
XY stage travel200 × 200 mm
Z stage travel25 mm
Focus travel8 mm
Optical field of view840 × 630 µm with 10× objective
Camera5 MP CCD
Topography modesContact / True Non-Contact / Tapping / PinPoint
Control softwarePark SmartScan; licences and modules per specification
Acoustic environmentNoise below 65 dB
Floor vibrationVC-D (6.25 µm/s)

Application and configuration

For nanoscale topography of wafers, coatings, polymers and semiconductor structures. This is the NX20 model for wafers up to 200 mm; the separate NX20 300 mm model has a different specification. Agree scanners, probes, vacuum mounting, controller, software licences, vibration isolation, acoustic enclosure, computer workstation, installation and training. A magnetic mount for 16 small samples, a 30 µm Z scanner, electrical modes and liquid operation are not automatically included. The photograph illustrates one equipment configuration. Request pricing for the agreed package.

Atomic force microscopes

Compare with: Bruker Dimension Icon.

Park NX20

Price upon request
Request the price
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